Formation of SiC nanoparticles in an atmospheric microwave plasma
نویسندگان
چکیده
منابع مشابه
Formation of SiC nanoparticles in an atmospheric microwave plasma
We describe the formation of SiC nanopowder using an atmospheric argon microwave plasma with tetramethylsilane (TMS) as precursor. The impact of several process conditions on the particle size of the product is experimentally investigated. Particles with sizes ranging from 7 nm to about 20 nm according to BET and XRD measurements are produced. The dependency of the particle size on the process ...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2011
ISSN: 2190-4286
DOI: 10.3762/bjnano.2.71